{"id":63107,"date":"2025-12-23T22:41:40","date_gmt":"2025-12-23T13:41:40","guid":{"rendered":"https:\/\/www.marketresearch.jp\/reports\/?p=63107"},"modified":"2026-09-25T23:35:02","modified_gmt":"2026-09-25T14:35:02","slug":"mems-chiller-market","status":"publish","type":"post","link":"https:\/\/www.marketresearch.jp\/reports\/mems-chiller-market\/","title":{"rendered":"\u4e16\u754c\u306eMEMS\u30c1\u30e9\u30fc\u5e02\u5834\uff1a\u30bf\u30a4\u30d7\u5225\uff08\u5438\u53ce\u5f0f\u3001\u7a7a\u51b7\u5f0f\u3001\u6c34\u51b7\u5f0f\uff09\u3001\u6700\u7d42\u7528\u9014\u5225\uff08\u5546\u696d\u7528\u3001\u30c7\u30fc\u30bf\u30bb\u30f3\u30bf\u30fc\u3001\u30d8\u30eb\u30b9\u30b1\u30a2\uff09\u3001\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u5225\u3001\u6280\u8853\u5225\u3001\u51b7\u5374\u80fd\u529b\u5225 &#8211; \u30b0\u30ed\u30fc\u30d0\u30eb\u4e88\u6e2c 2025\u5e74\uff5e2032\u5e74"},"content":{"rendered":"<p><img decoding=\"async\" src=\"https:\/\/www.marketresearch.jp\/reports\/wp-content\/uploads\/2025\/12\/mems-chiller-statistics.png\" alt=\"Market Statistics\" style=\"max-width:100%;\"><\/p>\n<p>\u4ee5\u4e0b\u306b\u3001\u8a73\u7d30\u306a\u968e\u5c64\u69cb\u9020\u3092\u6301\u3064\u65e5\u672c\u8a9e\u306e\u76ee\u6b21\u3092\u69cb\u7bc9\u3057\u307e\u3059\u3002<\/p>\n<p>&#8212;<\/p>\n<p>**\u76ee\u6b21**<\/p>\n<p>*   **\u5e8f\u6587**<br \/>\n    *   \u5e02\u5834\u30bb\u30b0\u30e1\u30f3\u30c6\u30fc\u30b7\u30e7\u30f3\u3068\u5bfe\u8c61\u7bc4\u56f2<br \/>\n    *   \u8abf\u67fb\u5bfe\u8c61\u671f\u9593<br \/>\n    *   \u901a\u8ca8<br \/>\n    *   \u8a00\u8a9e<br \/>\n    *   \u30b9\u30c6\u30fc\u30af\u30db\u30eb\u30c0\u30fc<br \/>\n*   **\u8abf\u67fb\u65b9\u6cd5**<br \/>\n*   **\u30a8\u30b0\u30bc\u30af\u30c6\u30a3\u30d6\u30b5\u30de\u30ea\u30fc**<br \/>\n*   **\u5e02\u5834\u6982\u8981**<br \/>\n*   **\u5e02\u5834\u30a4\u30f3\u30b5\u30a4\u30c8**<br \/>\n    *   \u9ad8\u51fa\u529b\u96fb\u5b50\u6a5f\u5668\u306b\u304a\u3051\u308b\u7cbe\u5bc6\u306a\u71b1\u7ba1\u7406\u306e\u305f\u3081\u306e\u30de\u30a4\u30af\u30ed\u6d41\u4f53\u51b7\u5374\u30b7\u30b9\u30c6\u30e0\u3068MEMS\u30c1\u30e9\u30fc\u306e\u7d71\u5408<br \/>\n    *   \u53b3\u683c\u306a\u74b0\u5883\u898f\u5236\u3092\u6e80\u305f\u3059\u305f\u3081\u306eMEMS\u30c1\u30e9\u30fc\u8a2d\u8a08\u306b\u304a\u3051\u308b\u74b0\u5883\u306b\u512a\u3057\u3044\u51b7\u5a92\u306e\u63a1\u7528<br \/>\n    *   MEMS\u30c1\u30e9\u30fc\u306e\u52b9\u7387\u3068\u30b9\u30b1\u30fc\u30e9\u30d3\u30ea\u30c6\u30a3\u3092\u5411\u4e0a\u3055\u305b\u308b\u305f\u3081\u306e\u30a6\u30a7\u30cf\u30fc\u30ec\u30d9\u30eb\u30de\u30a4\u30af\u30ed\u30c1\u30e3\u30cd\u30eb\u71b1\u4ea4\u63db\u5668\u306e\u958b\u767a<br \/>\n    *   MEMS\u30c1\u30e9\u30fc\u306e\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u6027\u80fd\u6700\u9069\u5316\u306e\u305f\u3081\u306e\u30ca\u30ce\u30b9\u30b1\u30fc\u30eb\u6e29\u5ea6\u30bb\u30f3\u30b7\u30f3\u30b0\u7d71\u5408\u306e\u9032\u6b69<br \/>\n    *   \u751f\u7523\u30b3\u30b9\u30c8\u3092\u524a\u6e1b\u3059\u308b\u305f\u3081\u306e\u8907\u96d1\u306aMEMS\u30c1\u30e9\u30fc\u90e8\u54c1\u88fd\u9020\u306b\u304a\u3051\u308b\u7a4d\u5c64\u9020\u5f62\u6280\u8853\u306e\u5229\u7528<br \/>\n    *   \u5bb6\u5ead\u7528\u96fb\u5316\u88fd\u54c1\u306b\u304a\u3051\u308b\u9759\u97f3\u304b\u3064\u30b3\u30f3\u30d1\u30af\u30c8\u306a\u51b7\u5374\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3068\u3057\u3066\u306e\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u71b1\u96fbMEMS\u30c1\u30e9\u30fc\u306e\u767b\u5834<br \/>\n    *   \u7523\u696d\u7528\u9014\u306b\u304a\u3051\u308bMEMS\u30c1\u30e9\u30fc\u30b7\u30b9\u30c6\u30e0\u306e\u4e88\u77e5\u4fdd\u5168\u306e\u305f\u3081\u306e\u9ad8\u5ea6\u306a\u6a5f\u68b0\u5b66\u7fd2\u30a2\u30eb\u30b4\u30ea\u30ba\u30e0<br \/>\n    *   \u81e8\u5e8a\u8a3a\u65ad\u4e2d\u306e\u7cbe\u5bc6\u306a\u6e29\u5ea6\u8abf\u7bc0\u306e\u305f\u3081\u306e\u30d0\u30a4\u30aa\u30e1\u30c7\u30a3\u30ab\u30eb\u30c7\u30d0\u30a4\u30b9\u306b\u304a\u3051\u308b\u5c0f\u578b\u30c1\u30e9\u30fc\u30e2\u30b8\u30e5\u30fc\u30eb\u306e\u65b0\u305f\u306a\u9700\u8981<br \/>\n*   **\u7c73\u56fd\u95a2\u7a0e\u306e\u7d2f\u7a4d\u7684\u5f71\u97ff 2025\u5e74**<br \/>\n*   **\u4eba\u5de5\u77e5\u80fd\u306e\u7d2f\u7a4d\u7684\u5f71\u97ff 2025\u5e74**<br \/>\n*   **MEMS\u30c1\u30e9\u30fc\u5e02\u5834\u3001\u30bf\u30a4\u30d7\u5225**<br \/>\n    *   \u5438\u53ce\u5f0f\u51b7\u5374<br \/>\n    *   \u7a7a\u51b7\u5f0f<br \/>\n    *   \u6c34\u51b7\u5f0f<br \/>\n*   **MEMS\u30c1\u30e9\u30fc\u5e02\u5834\u3001\u6700\u7d42\u7528\u9014\u5225**<br \/>\n    *   \u5546\u696d\u7528<br \/>\n    *   \u30c7\u30fc\u30bf\u30bb\u30f3\u30bf\u30fc<br \/>\n    *   \u30d8\u30eb\u30b9\u30b1\u30a2<br \/>\n    *   \u7523\u696d\u7528<br \/>\n*   **MEMS\u30c1\u30e9\u30fc\u5e02\u5834\u3001\u7528\u9014\u5225**<br \/>\n    *   \u7a7a\u8abf<br \/>\n    *   \u98df\u54c1\u30fb\u98f2\u6599<br \/>\n    *   \u77f3\u6cb9\u5316\u5b66<br \/>\n    *   \u88fd\u85ac<br \/>\n    *   \u767a\u96fb<br \/>\n    *   \u30d7\u30ed\u30bb\u30b9\u51b7\u5374<br \/>\n*   **MEMS\u30c1\u30e9\u30fc\u5e02\u5834\u3001\u6280\u8853\u5225**<br \/>\n    *   \u9060\u5fc3\u5f0f<br \/>\n        *   \u591a\u6bb5\u5f0f<br \/>\n        *   \u5358\u6bb5\u5f0f<br \/>\n    *   \u5f80\u5fa9\u5f0f<br \/>\n        *   \u591a\u6c17\u7b52<br \/>\n        *   \u5358\u6c17\u7b52<br \/>\n    *   \u30b9\u30af\u30ea\u30e5\u30fc\u5f0f<br \/>\n        *   \u30b7\u30f3\u30b0\u30eb\u30b9\u30af\u30ea\u30e5\u30fc<br \/>\n        *   \u30c4\u30a4\u30f3\u30b9\u30af\u30ea\u30e5\u30fc<br \/>\n    *   \u30b9\u30af\u30ed\u30fc\u30eb\u5f0f<br \/>\n        *   \u30aa\u30a4\u30eb\u30d5\u30ea\u30fc<br \/>\n        *   \u6cb9\u6f64\u6ed1\u5f0f<br \/>\n*   **MEMS\u30c1\u30e9\u30fc\u5e02\u5834\u3001\u51b7\u5374\u80fd\u529b\u5225**<br \/>\n    *   151\uff5e400\u30c8\u30f3<br \/>\n    *   400\u30c8\u30f3\u4ee5\u4e0a<br \/>\n    *   150\u30c8\u30f3\u4ee5\u4e0b<br \/>\n*   **MEMS\u30c1\u30e9\u30fc\u5e02\u5834\u3001\u5730\u57df\u5225**<br \/>\n    *   \u7c73\u5dde<br \/>\n        *   \u5317\u7c73<br \/>\n        *   \u4e2d\u5357\u7c73<br \/>\n    *   \u6b27\u5dde\u3001\u4e2d\u6771\u3001\u30a2\u30d5\u30ea\u30ab<br \/>\n        *   \u6b27\u5dde<br \/>\n        *   \u4e2d\u6771<br \/>\n        *   \u30a2\u30d5\u30ea\u30ab<br \/>\n    *   \u30a2\u30b8\u30a2\u592a\u5e73\u6d0b<br \/>\n*   **MEMS\u30c1\u30e9\u30fc\u5e02\u5834\u3001\u30b0\u30eb\u30fc\u30d7\u5225**<br \/>\n    *   ASEAN<br \/>\n    *   GCC<br \/>\n    *   \u6b27\u5dde\u9023\u5408<br \/>\n    *   BRICS<br \/>\n    *   G7<br \/>\n    *   NATO<br \/>\n*   **MEMS\u30c1\u30e9\u30fc\u5e02\u5834\u3001\u56fd\u5225**<br \/>\n    *   \u7c73\u56fd<br \/>\n    *   \u30ab\u30ca\u30c0<br \/>\n    *   \u30e1\u30ad\u30b7\u30b3<br \/>\n    *   \u30d6\u30e9\u30b8\u30eb<br \/>\n    *   \u82f1\u56fd<br \/>\n    *   \u30c9\u30a4\u30c4<br \/>\n    *   \u30d5\u30e9\u30f3\u30b9<br \/>\n    *   \u30ed\u30b7\u30a2<br \/>\n    *   \u30a4\u30bf\u30ea\u30a2<br \/>\n    *   \u30b9\u30da\u30a4\u30f3<br \/>\n    *   \u4e2d\u56fd<br \/>\n    *   \u30a4\u30f3\u30c9<br \/>\n    *   \u65e5\u672c<br \/>\n    *   \u30aa\u30fc\u30b9\u30c8\u30e9\u30ea\u30a2<br \/>\n    *   \u97d3\u56fd<br \/>\n*   **\u7af6\u4e89\u74b0\u5883**<br \/>\n    *   \u5e02\u5834\u30b7\u30a7\u30a2\u5206\u6790\u30012024\u5e74<br \/>\n    *   FPNV\u30dd\u30b8\u30b7\u30e7\u30cb\u30f3\u30b0\u30de\u30c8\u30ea\u30c3\u30af\u30b9\u30012024\u5e74<br \/>\n    *   \u7af6\u5408\u5206\u6790<br \/>\n        *   Koolance Inc.<br \/>\n        *   CoolIT Systems Inc.<br \/>\n        *   TAT Technologies Ltd.<br \/>\n        *   Mikros Technologies Inc.<br \/>\n        *   KELK Ltd.<br \/>\n        *   Thermoelectric Cooling America Corporation<br \/>\n        *   RMT Ltd.<br \/>\n        *   Crystalonics Inc.<br \/>\n        *   Thermion Company<br \/>\n        *   European Thermodynamics Ltd.<br \/>\n        *   Kryotherm Inc.<br \/>\n        *   Phononic Inc.<br \/>\n        *   Tellurex Corporation<br \/>\n        *   Lytron Inc.<br \/>\n        *   Kooltronic Inc.<br \/>\n        *   Delta Group<br \/>\n        *   Fujikura Ltd.<br \/>\n        *   Altech Corporation<br \/>\n        *   Custom Thermoelectric LLC<br \/>\n        *   Z-Max Co., Ltd.<br \/>\n        *   Thermoelectrics.com Inc.<br \/>\n        *   P&#038;R Microelectronics Ltd.<br \/>\n        *   KRYOTHERM GmbH<br \/>\n        *   TEC Microsystems GmbH<br \/>\n        *   ThermoAmp Inc.<br \/>\n*   **\u56f3\u8868\u30ea\u30b9\u30c8 [\u5408\u8a08: 30]**<br \/>\n*   **\u8868\u30ea\u30b9\u30c8 [\u5408\u8a08: 747]**<\/p>\n<p>&#8230;&#8230;&#8230;&#8230; (\u4ee5\u4e0b\u7701\u7565)<\/p>\n","protected":false},"excerpt":{"rendered":"<p>**MEMS\u30c1\u30e9\u30fc\u5e02\u5834\uff1a\u8a73\u7d30\u306a\u5206\u6790\u3068\u5c06\u6765\u5c55\u671b**<\/p>\n<p>**\u5e02\u5834\u6982\u8981**<br \/>\nMEMS\u30c1\u30e9\u30fc\u5e02\u5834\u306f\u3001\u9ad8\u5ea6\u306a\u71b1\u7ba1\u7406\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u306e\u6700\u524d\u7dda\u306b\u4f4d\u7f6e\u3057\u3001\u30a8\u30cd\u30eb\u30ae\u30fc\u52b9\u7387\u304c\u9ad8\u304f\u5c0f\u578b\u5316\u3055\u308c\u305f\u51b7\u5374\u30b7\u30b9\u30c6\u30e0\u3078\u306e\u9700\u8981\u306e\u9ad8\u307e\u308a\u306b\u727d\u5f15\u3055\u308c\u3066\u3044\u307e\u3059\u30022024\u5e74\u306b\u306f8\u5104345\u4e07\u7c73\u30c9\u30eb\u3068\u63a8\u5b9a\u3055\u308c\u305f\u5e02\u5834\u898f\u6a21\u306f\u30012025\u5e74\u306b\u306f8\u51044464\u4e07\u7c73\u30c9\u30eb\u306b\u9054\u3057\u30012032\u5e74\u307e\u3067\u306b\u306f\u5e74\u5e73\u5747\u6210\u9577\u7387\uff08CAGR\uff096.27%\u306713\u5104724\u4e07\u7c73\u30c9\u30eb\u306b\u6210\u9577\u3059\u308b\u3068\u4e88\u6e2c\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u30c7\u30b8\u30bf\u30eb\u5316\u306e\u52a0\u901f\u3068\u30c7\u30fc\u30bf\u30bb\u30f3\u30bf\u30fc\u306e\u6025\u5897\u306b\u4f34\u3044\u3001\u3088\u308a\u30b3\u30f3\u30d1\u30af\u30c8\u3067\u4fe1\u983c\u6027\u304c\u9ad8\u304f\u3001\u7cbe\u5bc6\u306a\u6e29\u5ea6\u5236\u5fa1\u30b7\u30b9\u30c6\u30e0\u304c\u6c42\u3081\u3089\u308c\u3066\u304a\u308a\u3001MEMS\u30c1\u30e9\u30fc\u306f\u305d\u306e\u5fae\u5c0f\u96fb\u6c17\u6a5f\u68b0\u7684\u7cbe\u5ea6\u3068\u9ad8\u3044\u71b1\u4f1d\u9054\u52b9\u7387\u306b\u3088\u308a\u3001\u6027\u80fd\u6700\u9069\u5316\u3068\u53b3\u683c\u306a\u6301\u7d9a\u53ef\u80fd\u6027\u8981\u4ef6\u3078\u306e\u5bfe\u5fdc\u3092\u76ee\u6307\u3059\u4f01\u696d\u304b\u3089\u5927\u304d\u306a\u95a2\u5fc3\u3092\u96c6\u3081\u3066\u3044\u307e\u3059\u3002\u30b0\u30ed\u30fc\u30d0\u30eb\u306a\u30a8\u30cd\u30eb\u30ae\u30fc\u5236\u7d04\u3068\u74b0\u5883\u898f\u5236\u306e\u5f37\u5316\u306f\u3001\u6e29\u5ba4\u52b9\u679c\u30ac\u30b9\u6392\u51fa\u91cf\u306e\u5c11\u306a\u3044\u51b7\u5374\u6280\u8853\u3078\u306e\u79fb\u884c\u3092\u4fc3\u3057\u3066\u304a\u308a\u3001MEMS\u30c1\u30e9\u30fc\u306f\u51b7\u5a92\u5145\u586b\u91cf\u306e\u6700\u5c0f\u5316\u3001\u8fc5\u901f\u306a\u5fdc\u7b54\u6642\u9593\u3001\u30d3\u30eb\u7ba1\u7406\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\u3068\u306e\u30b7\u30fc\u30e0\u30ec\u30b9\u306a\u7d71\u5408\u3068\u3044\u3063\u305f\u72ec\u81ea\u306e\u4fa1\u5024\u63d0\u6848\u306b\u3088\u308a\u3001\u3053\u306e\u79fb\u884c\u306b\u304a\u3044\u3066\u91cd\u8981\u306a\u5f79\u5272\u3092\u62c5\u3063\u3066\u3044\u307e\u3059\u3002IoT\u63a5\u7d9a\u3068\u5148\u9032\u6750\u6599\u79d1\u5b66\u306e\u878d\u5408\u306f\u3001\u51b7\u5374\u52b9\u7387\u3068\u904b\u7528\u56de\u5fa9\u529b\u306e\u9650\u754c\u3092\u518d\u5b9a\u7fa9\u3059\u308b\u6b21\u4e16\u4ee3\u88fd\u54c1\u9769\u65b0\u3092\u4fc3\u9032\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n<p>**\u63a8\u9032\u8981\u56e0**<\/p>\n<p>**1. \u6280\u8853\u9769\u65b0\u3068\u52b9\u7387\u6027\u306e\u5411\u4e0a:**<br \/>\nMEMS\u30c1\u30e9\u30fc\u5e02\u5834\u306f\u3001\u6280\u8853\u7684\u306a\u30d6\u30ec\u30fc\u30af\u30b9\u30eb\u30fc\u306b\u3088\u3063\u3066\u5927\u304d\u304f\u5909\u9769\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u4ed8\u52a0\u88fd\u9020\u6280\u8853\u306e\u9032\u6b69\u306f\u3001\u71b1\u4ea4\u63db\u6027\u80fd\u3092\u5927\u5e45\u306b\u5411\u4e0a\u3055\u305b\u308b\u8907\u96d1\u306a\u30de\u30a4\u30af\u30ed\u30c1\u30e3\u30cd\u30eb\u69cb\u9020\u306e\u88fd\u9020\u3092\u53ef\u80fd\u306b\u3057\u307e\u3057\u305f\u3002\u307e\u305f\u3001\u4eba\u5de5\u77e5\u80fd\uff08AI\uff09\u99c6\u52d5\u578b\u5236\u5fa1\u30a2\u30eb\u30b4\u30ea\u30ba\u30e0\u3068\u30c7\u30b8\u30bf\u30eb\u30c4\u30a4\u30f3\u30e2\u30c7\u30ea\u30f3\u30b0\u306e\u7d71\u5408\u306f\u3001\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u306e\u30b7\u30b9\u30c6\u30e0\u6700\u9069\u5316\u3092\u4fc3\u9032\u3057\u3001\u30a8\u30cd\u30eb\u30ae\u30fc\u5229\u7528\u52b9\u7387\u3068\u4e88\u6e2c\u4fdd\u5168\u80fd\u529b\u3092\u98db\u8e8d\u7684\u306b\u5411\u4e0a\u3055\u305b\u3066\u3044\u307e\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u30b3\u30f3\u30d1\u30af\u30c8\u306a\u30c1\u30e9\u30fc\u306e\u52b9\u7387\u57fa\u6e96\u304c\u5411\u4e0a\u3057\u305f\u3060\u3051\u3067\u306a\u304f\u3001\u591a\u69d8\u306a\u904b\u7528\u74b0\u5883\u306b\u9069\u5fdc\u53ef\u80fd\u306a\u30e2\u30b8\u30e5\u30fc\u30eb\u5f0f\u3067\u30b9\u30b1\u30fc\u30e9\u30d6\u30eb\u306a\u51b7\u5374\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u3078\u306e\u79fb\u884c\u304c\u52a0\u901f\u3057\u3066\u3044\u307e\u3059\u3002\u3055\u3089\u306b\u3001\u30e1\u30fc\u30ab\u30fc\u306f\u9ad8\u5730\u7403\u6e29\u6696\u5316\u4fc2\u6570\uff08GWP\uff09\u51b7\u5a92\u304b\u3089\u4f4eGWP\u4ee3\u66ff\u54c1\u3078\u306e\u79fb\u884c\u3092\u9032\u3081\u3001\u78c1\u6c17\u51b7\u5374\u3084\u71b1\u96fb\u51b7\u5374\u539f\u7406\u3092\u88dc\u5b8c\u7684\u307e\u305f\u306f\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u306a\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3068\u3057\u3066\u63a2\u6c42\u3057\u3066\u304a\u308a\u3001\u6750\u6599\u79d1\u5b66\u8005\u3001\u534a\u5c0e\u4f53\u30d5\u30a1\u30a6\u30f3\u30c9\u30ea\u3001OEM\u9593\u306e\u65b0\u305f\u306a\u30d1\u30fc\u30c8\u30ca\u30fc\u30b7\u30c3\u30d7\u304c\u4fc3\u9032\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n<p>**2. 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\/>\n\u30c7\u30b8\u30bf\u30eb\u5316\u306e\u6df1\u5316\u3068\u30c7\u30fc\u30bf\u30bb\u30f3\u30bf\u30fc\u306e\u7206\u767a\u7684\u306a\u5897\u52a0\u306f\u3001MEMS\u30c1\u30e9\u30fc\u5e02\u5834\u306e\u4e3b\u8981\u306a\u6210\u9577\u30c9\u30e9\u30a4\u30d0\u30fc\u3067\u3042\u308a\u3001\u30c7\u30fc\u30bf\u30bb\u30f3\u30bf\u30fc\u306f\u8d85\u5fdc\u7b54\u6027\u306e\u30de\u30a4\u30af\u30ed\u30b9\u30b1\u30fc\u30eb\u51b7\u5374\u30eb\u30fc\u30d7\u306e\u91cd\u8981\u6027\u3092\u9ad8\u3081\u3066\u3044\u307e\u3059\u3002\u5546\u696d\u65bd\u8a2d\u306f\u7cbe\u5bc6\u306a\u6e29\u5ea6\u8abf\u6574\u306e\u9700\u8981\u306b\u3088\u308a\u4f1d\u7d71\u7684\u306a\u4e3b\u8981\u30e6\u30fc\u30b6\u30fc\u3067\u3042\u308a\u3001\u30d8\u30eb\u30b9\u30b1\u30a2\u6a5f\u95a2\u306f\u60a3\u8005\u30b1\u30a2\u3068\u5b9f\u9a13\u5ba4\u904b\u55b6\u306e\u305f\u3081\u306e\u91cd\u8981\u306a\u74b0\u5883\u6761\u4ef6\u7dad\u6301\u306bMEMS\u30c1\u30e9\u30fc\u3092\u307e\u3059\u307e\u3059\u6d3b\u7528\u3057\u3066\u3044\u307e\u3059\u3002\u98df\u54c1\u30fb\u98f2\u6599\u88fd\u9020\u3001\u77f3\u6cb9\u5316\u5b66\u51e6\u7406\u3001\u533b\u85ac\u54c1\u751f\u7523\u306a\u3069\u306e\u5c02\u9580\u5206\u91ce\u3067\u306f\u3001\u53b3\u683c\u306a\u6e29\u5ea6\u8a31\u5bb9\u5ea6\u3068\u885b\u751f\u57fa\u6e96\u3092\u9075\u5b88\u3059\u308b\u305f\u3081\u306bMEMS\u30d9\u30fc\u30b9\u306e\u30c1\u30e9\u30fc\u306e\u63a1\u7528\u3092\u5f37\u5316\u3057\u3066\u3044\u307e\u3059\u3002\u7a7a\u8abf\u306f\u4f9d\u7136\u3068\u3057\u3066\u4e3b\u8981\u306a\u7528\u9014\u3067\u3059\u304c\u3001\u96fb\u529b\u751f\u6210\u3084\u30d7\u30ed\u30bb\u30b9\u51b7\u5374\u306e\u6587\u8108\u3067\u306f\u3001\u3053\u306e\u6280\u8853\u306e\u30e2\u30b8\u30e5\u30fc\u30eb\u6027\u3068\u8010\u6545\u969c\u6027\u8a2d\u8a08\u304c\u3001\u3088\u308a\u5927\u898f\u6a21\u306a\u71b1\u7ba1\u7406\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u3078\u306e\u30b7\u30fc\u30e0\u30ec\u30b9\u306a\u7d71\u5408\u3092\u4fc3\u9032\u3057\u3001\u30d7\u30e9\u30f3\u30c8\u5168\u4f53\u306e\u4fe1\u983c\u6027\u3092\u5411\u4e0a\u3055\u305b\u3066\u3044\u307e\u3059\u3002\u51b7\u5374\u5bb9\u91cf\u306e\u591a\u69d8\u5316\u3082\u9032\u3093\u3067\u304a\u308a\u3001150\u30c8\u30f3\u307e\u3067\u306e\u30e6\u30cb\u30c3\u30c8\u306f\u4e2d\u5c0f\u4f01\u696d\u3084\u30e2\u30b8\u30e5\u30fc\u30eb\u5f0f\u6539\u4fee\u306b\u3001400\u30c8\u30f3\u3092\u8d85\u3048\u308b\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u306f\u91cd\u5de5\u696d\u304a\u3088\u3073\u5927\u898f\u6a21\u30c7\u30fc\u30bf\u30bb\u30f3\u30bf\u30fc\u306e\u8a2d\u5099\u306b\u5bfe\u5fdc\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n<p>**3. 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