{"id":53035,"date":"2025-12-19T20:06:46","date_gmt":"2025-12-19T11:06:46","guid":{"rendered":"https:\/\/www.marketresearch.jp\/reports\/?p=53035"},"modified":"2026-09-25T00:39:13","modified_gmt":"2026-09-24T15:39:13","slug":"ic-cmp-slurries-market","status":"publish","type":"post","link":"https:\/\/www.marketresearch.jp\/reports\/ic-cmp-slurries-market\/","title":{"rendered":"\u4e16\u754c\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\uff1a\u30b9\u30e9\u30ea\u30fc\u30bf\u30a4\u30d7\u5225\uff08\u30d0\u30ea\u30a2\u3001\u9285\u3001\u9178\u5316\u819c\uff09\u3001\u30a6\u30a7\u30fc\u30cf\u30b5\u30a4\u30ba\u5225\uff08200mm\u3001300mm\uff09\u3001CMP\u30d7\u30ed\u30bb\u30b9\u5225\u3001\u7528\u9014\u5225 – \u30b0\u30ed\u30fc\u30d0\u30eb\u4e88\u6e2c 2025\u5e74\uff5e2032\u5e74"},"content":{"rendered":"

\"Market<\/p>\n

\u4ee5\u4e0b\u306bTOC\u306e\u65e5\u672c\u8a9e\u8a33\u3068\u8a73\u7d30\u306a\u968e\u5c64\u69cb\u9020\u3092\u793a\u3057\u307e\u3059\u3002<\/p>\n

—<\/p>\n

**\u76ee\u6b21**<\/p>\n

1. **\u5e8f\u6587**
\n * \u5e02\u5834\u30bb\u30b0\u30e1\u30f3\u30c6\u30fc\u30b7\u30e7\u30f3\u3068\u30ab\u30d0\u30ec\u30c3\u30b8
\n * \u8abf\u67fb\u5bfe\u8c61\u671f\u9593
\n * \u901a\u8ca8
\n * \u8a00\u8a9e
\n * \u30b9\u30c6\u30fc\u30af\u30db\u30eb\u30c0\u30fc
\n2. **\u8abf\u67fb\u65b9\u6cd5**
\n3. **\u30a8\u30b0\u30bc\u30af\u30c6\u30a3\u30d6\u30b5\u30de\u30ea\u30fc**
\n4. **\u5e02\u5834\u6982\u8981**
\n5. **\u5e02\u5834\u30a4\u30f3\u30b5\u30a4\u30c8**
\n * \u30b5\u30d65nm\u30ce\u30fc\u30c9\u306b\u304a\u3051\u308b\u8868\u9762\u6b20\u9665\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u308b\u305f\u3081\u306e\u30ca\u30ce\u7c92\u5b50\u8a2d\u8a08\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u306e\u958b\u767a
\n * \u30ea\u30a2\u30eb\u30bf\u30a4\u30e0CMP\u30d7\u30ed\u30bb\u30b9\u5236\u5fa1\u306e\u305f\u3081\u306e\u9ad8\u5ea6\u306ain situ\u5149\u5b66\u7d42\u70b9\u691c\u51fa\u30bb\u30f3\u30b5\u30fc\u306e\u5b9f\u88c5
\n * \u534a\u5c0e\u4f53\u88fd\u9020\u5de5\u5834\u306e\u74b0\u5883\u8ca0\u8377\u3092\u4f4e\u6e1b\u3059\u308b\u305f\u3081\u306e\u74b0\u5883\u306b\u512a\u3057\u3044\u751f\u5206\u89e3\u6027\u30b9\u30e9\u30ea\u30fc\u5316\u5b66\u7269\u8cea\u306e\u63a1\u7528
\n * IC CMP\u30b9\u30e9\u30ea\u30fc\u6027\u80fd\u306e\u7d99\u7d9a\u7684\u306a\u6700\u9069\u5316\u306e\u305f\u3081\u306eAI\u99c6\u52d5\u578b\u4e88\u6e2c\u5206\u6790\u306e\u7d71\u5408
\n * \u6b21\u4e16\u4ee3\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u5411\u3051\u9ad8\u9078\u629e\u6027\u91d1\u5c5e\u9664\u53bb\u30b9\u30e9\u30ea\u30fc\u914d\u5408\u306e\u30b9\u30b1\u30fc\u30ea\u30f3\u30b0
\n * \u6301\u7d9a\u53ef\u80fd\u306a\u534a\u5c0e\u4f53\u88fd\u9020\u306e\u305f\u3081\u306e\u30b9\u30e9\u30ea\u30fc\u30ea\u30b5\u30a4\u30af\u30eb\u304a\u3088\u3073\u5ec3\u68c4\u7269\u51e6\u7406\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u306e\u9032\u6b69
\n6. **2025\u5e74\u7c73\u56fd\u95a2\u7a0e\u306e\u7d2f\u7a4d\u7684\u5f71\u97ff**
\n7. **2025\u5e74\u4eba\u5de5\u77e5\u80fd\u306e\u7d2f\u7a4d\u7684\u5f71\u97ff**
\n8. **IC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\uff1a\u30b9\u30e9\u30ea\u30fc\u30bf\u30a4\u30d7\u5225**
\n * \u30d0\u30ea\u30a2
\n * \u9ad8\u8a98\u96fb\u7387\uff08High-K\uff09\u8a98\u96fb\u4f53
\n * \u4f4e\u8a98\u96fb\u7387\uff08Low-K\uff09\u8a98\u96fb\u4f53
\n * \u9285
\n * \u9178\u6027\u9285
\n * \u30a2\u30eb\u30ab\u30ea\u6027\u9285
\n * \u4e2d\u6027\u9285
\n * \u9178\u5316\u7269
\n * \u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab
\n * \u30d2\u30e5\u30fc\u30e0\u30c9\u30b7\u30ea\u30ab
\n9. **IC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\uff1a\u30a6\u30a7\u30fc\u30cf\u30b5\u30a4\u30ba\u5225**
\n * 200 mm
\n * 300 mm
\n10. **IC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\uff1aCMP\u30d7\u30ed\u30bb\u30b9\u5225**
\n * \u30d0\u30c3\u30c1
\n * \u30b7\u30f3\u30b0\u30eb\u30a6\u30a7\u30fc\u30cf
\n11. **IC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\uff1a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u5225**
\n * \u30d5\u30a1\u30a6\u30f3\u30c9\u30ea
\n * \u30ed\u30b8\u30c3\u30af
\n * \u30e1\u30e2\u30ea
\n * DRAM
\n * NAND\u30d5\u30e9\u30c3\u30b7\u30e5
\n12. **IC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\uff1a\u5730\u57df\u5225**
\n * \u7c73\u5dde
\n * \u5317\u7c73
\n * \u4e2d\u5357\u7c73
\n * \u6b27\u5dde\u3001\u4e2d\u6771\u3001\u30a2\u30d5\u30ea\u30ab
\n * \u6b27\u5dde
\n * \u4e2d\u6771
\n * \u30a2\u30d5\u30ea\u30ab
\n * \u30a2\u30b8\u30a2\u592a\u5e73\u6d0b
\n13. **IC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\uff1a\u30b0\u30eb\u30fc\u30d7\u5225**
\n * ASEAN
\n * GCC
\n * \u6b27\u5dde\u9023\u5408
\n * BRICS
\n * G7
\n * NATO
\n14. **IC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\uff1a\u56fd\u5225**
\n * \u7c73\u56fd
\n * \u30ab\u30ca\u30c0
\n * \u30e1\u30ad\u30b7\u30b3
\n * \u30d6\u30e9\u30b8\u30eb
\n * \u82f1\u56fd
\n * \u30c9\u30a4\u30c4
\n * \u30d5\u30e9\u30f3\u30b9
\n * \u30ed\u30b7\u30a2
\n * \u30a4\u30bf\u30ea\u30a2
\n * \u30b9\u30da\u30a4\u30f3
\n * \u4e2d\u56fd
\n * \u30a4\u30f3\u30c9
\n * \u65e5\u672c
\n * \u30aa\u30fc\u30b9\u30c8\u30e9\u30ea\u30a2
\n * \u97d3\u56fd
\n15. **\u7af6\u4e89\u74b0\u5883**
\n * \u5e02\u5834\u30b7\u30a7\u30a2\u5206\u6790\u30012024\u5e74
\n * FPNV\u30dd\u30b8\u30b7\u30e7\u30cb\u30f3\u30b0\u30de\u30c8\u30ea\u30c3\u30af\u30b9\u30012024\u5e74
\n * \u7af6\u5408\u5206\u6790
\n * \u30ad\u30e3\u30dc\u30c3\u30c8\u30fb\u30de\u30a4\u30af\u30ed\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u30fb\u30b3\u30fc\u30dd\u30ec\u30fc\u30b7\u30e7\u30f3
\n * \u30d5\u30b8\u30df\u30a4\u30f3\u30b3\u30fc\u30dd\u30ec\u30fc\u30c6\u30c3\u30c9
\n * \u65e5\u7acb\u5316\u6210\u682a\u5f0f\u4f1a\u793e
\n * \u30c7\u30e5\u30dd\u30f3\u30fb\u30c9\u30fb\u30cc\u30e0\u30fc\u30eb\u30fb\u30a2\u30f3\u30c9\u30fb\u30ab\u30f3\u30d1\u30cb\u30fc
\n * \u30c0\u30a6\u30fb\u30b1\u30df\u30ab\u30eb\u30fb\u30ab\u30f3\u30d1\u30cb\u30fc
\n * BASF SE
\n * \u30e1\u30eb\u30afKGaA
\n * JSR\u682a\u5f0f\u4f1a\u793e
\n * \u30a8\u30f3\u30c6\u30b0\u30ea\u30b9\u30fb\u30a4\u30f3\u30af
\n * \u4e09\u83f1\u30b1\u30df\u30ab\u30eb\u682a\u5f0f\u4f1a\u793e<\/p>\n

**\u56f3\u76ee\u6b21** [\u5408\u8a08: 28]
\n1. \u4e16\u754c\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\u30012018-2032\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n2. \u4e16\u754c\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u30b9\u30e9\u30ea\u30fc\u30bf\u30a4\u30d7\u5225\u30012024\u5e74\u5bfe2032\u5e74\uff08%\uff09
\n3. \u4e16\u754c\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u30b9\u30e9\u30ea\u30fc\u30bf\u30a4\u30d7\u5225\u30012024\u5e74\u5bfe2025\u5e74\u5bfe2032\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n4. \u4e16\u754c\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u30a6\u30a7\u30fc\u30cf\u30b5\u30a4\u30ba\u5225\u30012024\u5e74\u5bfe2032\u5e74\uff08%\uff09
\n5. \u4e16\u754c\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u30a6\u30a7\u30fc\u30cf\u30b5\u30a4\u30ba\u5225\u30012024\u5e74\u5bfe2025\u5e74\u5bfe2032\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n6. \u4e16\u754c\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1aCMP\u30d7\u30ed\u30bb\u30b9\u5225\u30012024\u5e74\u5bfe2032\u5e74\uff08%\uff09
\n7. \u4e16\u754c\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1aCMP\u30d7\u30ed\u30bb\u30b9\u5225\u30012024\u5e74\u5bfe2025\u5e74\u5bfe2032\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n8. \u4e16\u754c\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u5225\u30012024\u5e74\u5bfe2032\u5e74\uff08%\uff09
\n9. \u4e16\u754c\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u5225\u30012024\u5e74\u5bfe2025\u5e74\u5bfe2032\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n10. \u4e16\u754c\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u5730\u57df\u5225\u30012024\u5e74\u5bfe2025\u5e74\u5bfe2032\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n11. \u7c73\u5dde\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u30b5\u30d6\u5730\u57df\u5225\u30012024\u5e74\u5bfe2025\u5e74\u5bfe2032\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n12. \u5317\u7c73\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u56fd\u5225\u30012024\u5e74\u5bfe2025\u5e74\u5bfe2032\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n13. \u4e2d\u5357\u7c73\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u56fd\u5225\u30012024\u5e74\u5bfe2025\u5e74\u5bfe2032\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n14. \u6b27\u5dde\u3001\u4e2d\u6771\u3001\u30a2\u30d5\u30ea\u30ab\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u30b5\u30d6\u5730\u57df\u5225\u30012024\u5e74\u5bfe2025\u5e74\u5bfe2032\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n15. \u6b27\u5dde\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u56fd\u5225\u30012024\u5e74\u5bfe2025\u5e74\u5bfe2032\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n16. \u4e2d\u6771\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u56fd\u5225\u30012024\u5e74\u5bfe2025\u5e74\u5bfe2032\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n17. \u30a2\u30d5\u30ea\u30ab\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u56fd\u5225\u30012024\u5e74\u5bfe2025\u5e74\u5bfe2032\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n18. \u30a2\u30b8\u30a2\u592a\u5e73\u6d0b\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u56fd\u5225\u30012024\u5e74\u5bfe2025\u5e74\u5bfe2032\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n19. \u4e16\u754c\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u30b0\u30eb\u30fc\u30d7\u5225\u30012024\u5e74\u5bfe2025\u5e74\u5bfe2032\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n20. ASEAN\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u56fd\u5225\u30012024\u5e74\u5bfe2025\u5e74\u5bfe2032\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n21. GCC\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u56fd\u5225\u30012024\u5e74\u5bfe2025\u5e74\u5bfe2032\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n22. \u6b27\u5dde\u9023\u5408\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u56fd\u5225\u30012024\u5e74\u5bfe2025\u5e74\u5bfe2032\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n23. BRICS\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u56fd\u5225\u30012024\u5e74\u5bfe2025\u5e74\u5bfe2032\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n24. G7\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u56fd\u5225\u30012024\u5e74\u5bfe2025\u5e74\u5bfe2032\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n25. NATO\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u56fd\u5225\u30012024\u5e74\u5bfe2025\u5e74\u5bfe2032\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n26. \u4e16\u754c\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u56fd\u5225\u30012024\u5e74\u5bfe2025\u5e74\u5bfe2032\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n27. IC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u30b7\u30a7\u30a2\uff1a\u4e3b\u8981\u30d7\u30ec\u30a4\u30e4\u30fc\u5225\u30012024\u5e74
\n28. IC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u3001FPNV\u30dd\u30b8\u30b7\u30e7\u30cb\u30f3\u30b0\u30de\u30c8\u30ea\u30c3\u30af\u30b9\u30012024\u5e74<\/p>\n

**\u8868\u76ee\u6b21** [\u5408\u8a08: 633]
\n1. IC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u306e\u30bb\u30b0\u30e1\u30f3\u30c6\u30fc\u30b7\u30e7\u30f3\u3068\u30ab\u30d0\u30ec\u30c3\u30b8
\n2. \u4e16\u754c\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\u30012018-2024\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n3. \u4e16\u754c\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\u30012025-2032\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n4. \u4e16\u754c\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u30b9\u30e9\u30ea\u30fc\u30bf\u30a4\u30d7\u5225\u30012018-2024\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n5. \u4e16\u754c\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u30b9\u30e9\u30ea\u30fc\u30bf\u30a4\u30d7\u5225\u30012025-2032\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n6. \u4e16\u754c\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u30d0\u30ea\u30a2\u5225\u30012018-2024\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n7. \u4e16\u754c\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u30d0\u30ea\u30a2\u5225\u30012025-2032\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n8. \u4e16\u754c\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u30d0\u30ea\u30a2\u5225\u3001\u5730\u57df\u5225\u30012018-2024\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n9. \u4e16\u754c\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u30d0\u30ea\u30a2\u5225\u3001\u5730\u57df\u5225\u30012025-2032\u5e74\uff08\u767e\u4e07\u7c73\u30c9\u30eb\uff09
\n10. \u4e16\u754c\u306eIC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u898f\u6a21\uff1a\u30d0\u30ea\u30a2\u5225\u3001… (\u4ee5\u964d\u3001\u540c\u69d8\u306e\u30d1\u30bf\u30fc\u30f3\u3067633\u9805\u76ee)<\/p>\n

………… (\u4ee5\u4e0b\u7701\u7565)<\/p>\n","protected":false},"excerpt":{"rendered":"

## IC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u306e\u5305\u62ec\u7684\u5206\u6790\uff1a\u5e02\u5834\u6982\u8981\u3001\u63a8\u9032\u8981\u56e0\u3001\u304a\u3088\u3073\u5c06\u6765\u5c55\u671b<\/p>\n

### \u5e02\u5834\u6982\u8981<\/p>\n

IC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u306f\u3001\u96c6\u7a4d\u56de\u8def\uff08IC\uff09\u88fd\u9020\u306b\u304a\u3051\u308b\u8868\u9762\u5e73\u5766\u5316\u306b\u4e0d\u53ef\u6b20\u306a\u6750\u6599\u3068\u3057\u3066\u3001\u904e\u53bb10\u5e74\u9593\u3067\u6c4e\u7528\u7684\u306a\u914d\u5408\u304b\u3089\u7279\u5b9a\u306e\u8a98\u96fb\u4f53\u5c64\u3084\u91d1\u5c5e\u5c64\u3092\u30bf\u30fc\u30b2\u30c3\u30c8\u3068\u3059\u308b\u5c02\u7528\u30d6\u30ec\u30f3\u30c9\u3078\u3068\u9032\u5316\u3092\u9042\u3052\u3066\u304d\u307e\u3057\u305f\u3002\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u306e\u30ce\u30fc\u30c9\u5fae\u7d30\u5316\u3068\u6027\u80fd\u5411\u4e0a\u306e\u8981\u6c42\u306b\u727d\u5f15\u3055\u308c\u3001\u7814\u78e8\u7c92\u5b50\u306e\u8a2d\u8a08\u3001\u5316\u5b66\u7d44\u6210\u3001\u304a\u3088\u3073\u30d7\u30ed\u30bb\u30b9\u30d1\u30e9\u30e1\u30fc\u30bf\u306e\u76f8\u4e92\u4f5c\u7528\u304c\u3001\u5148\u9032\u30ed\u30b8\u30c3\u30af\u3001\u30e1\u30e2\u30ea\u3001\u30d5\u30a1\u30a6\u30f3\u30c9\u30ea\u5404\u5c64\u306b\u304a\u3051\u308b\u6b69\u7559\u307e\u308a\u3068\u30c7\u30d0\u30a4\u30b9\u306e\u4fe1\u983c\u6027\u3092\u6c7a\u5b9a\u3059\u308b\u4e0a\u3067\u6975\u3081\u3066\u91cd\u8981\u306a\u8981\u7d20\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002<\/p>\n

\u73fe\u5728\u300110\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u4ee5\u4e0b\u306e\u30d5\u30a3\u30fc\u30c1\u30e3\u30b5\u30a4\u30ba\u7e2e\u5c0f\u3084\u3001\u30b2\u30fc\u30c8\u30aa\u30fc\u30eb\u30a2\u30e9\u30a6\u30f3\u30c9\uff08GAA\uff09\u69cb\u9020\u3001\u6975\u7aef\u7d2b\u5916\u7dda\uff08EUV\uff09\u30d1\u30bf\u30fc\u30cb\u30f3\u30b0\u69cb\u9020\u3068\u3044\u3063\u305f\u65b0\u305f\u306a\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u306e\u767b\u5834\u306b\u3088\u308a\u3001\u30c6\u30fc\u30e9\u30fc\u30e1\u30a4\u30c9\u306e\u9078\u629e\u6027\u3001\u6700\u5c0f\u9650\u306e\u6b20\u9665\u3001\u5805\u7262\u306a\u7d42\u70b9\u691c\u51fa\u6a5f\u80fd\u3092\u5099\u3048\u305fIC CMP\u30b9\u30e9\u30ea\u30fc\u3078\u306e\u9700\u8981\u304c\u5287\u7684\u306b\u9ad8\u307e\u3063\u3066\u3044\u307e\u3059\u3002\u540c\u6642\u306b\u3001\u74b0\u5883\u898f\u5236\u3084\u6cd5\u898f\u5236\u306e\u5727\u529b\u306f\u3001\u5f93\u6765\u306e\u9178\u5316\u5264\u3084\u5b89\u5b9a\u5264\u3092\u3088\u308a\u74b0\u5883\u306b\u512a\u3057\u3044\u4ee3\u66ff\u54c1\u306b\u7f6e\u304d\u63db\u3048\u3064\u3064\u3001\u5e73\u5766\u5316\u52b9\u7387\u3092\u640d\u306a\u308f\u306a\u3044\u3088\u3046\u30b9\u30e9\u30ea\u30fc\u958b\u767a\u8005\u306b\u8ab2\u984c\u3092\u7a81\u304d\u3064\u3051\u3066\u3044\u307e\u3059\u3002\u3053\u306e\u305f\u3081\u3001\u696d\u754c\u95a2\u4fc2\u8005\u306f\u3001\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u30ce\u30fc\u30c9\u306e\u53ef\u80fd\u6027\u3092\u6700\u5927\u9650\u306b\u5f15\u304d\u51fa\u3059\u305f\u3081\u306b\u3001\u6750\u6599\u79d1\u5b66\u306e\u30d6\u30ec\u30fc\u30af\u30b9\u30eb\u30fc\u3092\u53b3\u683c\u306a\u6c5a\u67d3\u7ba1\u7406\u3068\u30b3\u30b9\u30c8\u5236\u7d04\u306b\u9069\u5408\u3055\u305b\u308b\u3068\u3044\u3046\u8907\u96d1\u306a\u72b6\u6cc1\u3092\u4e57\u308a\u8d8a\u3048\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n

IC CMP\u30b9\u30e9\u30ea\u30fc\u5206\u91ce\u306f\u3001\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u3001\u6750\u6599\u5de5\u5b66\u3001\u30c7\u30b8\u30bf\u30eb\u30d7\u30ed\u30bb\u30b9\u5236\u5fa1\u306b\u304a\u3051\u308b\u6025\u901f\u306a\u9032\u6b69\u306b\u3088\u3063\u3066\u5909\u9769\u671f\u3092\u8fce\u3048\u3066\u3044\u307e\u3059\u3002\u5358\u5206\u6563\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab\u3084\u30a8\u30f3\u30b8\u30cb\u30a2\u30fc\u30c9\u30d2\u30e5\u30fc\u30e0\u30c9\u30b7\u30ea\u30ab\u3068\u3044\u3063\u305f\u7814\u78e8\u7c92\u5b50\u5408\u6210\u306e\u9769\u65b0\u306f\u3001\u4f4e\u8a98\u96fb\u7387\u819c\u306e\u5b8c\u5168\u6027\u3092\u4fdd\u8b77\u3057\u3064\u3064\u3001\u9178\u5316\u7269\u9664\u53bb\u306b\u304a\u3044\u3066\u524d\u4f8b\u306e\u306a\u3044\u7cbe\u5ea6\u3092\u53ef\u80fd\u306b\u3057\u3066\u3044\u307e\u3059\u3002\u4e00\u65b9\u3001\u9285\u30d0\u30ea\u30a2\u9664\u53bb\u5316\u5b66\u54c1\u306f\u3001\u9ad8\u8a98\u96fb\u7387\u819c\u304a\u3088\u3073\u4f4e\u8a98\u96fb\u7387\u819c\u3068\u306e\u9069\u5408\u6027\u3092\u9ad8\u3081\u308b\u305f\u3081\u306b\u518d\u8a2d\u8a08\u3055\u308c\u3001\u91d1\u5c5e\u914d\u7dda\u30d4\u30c3\u30c1\u306e\u7e2e\u5c0f\u8981\u4ef6\u306b\u5408\u81f4\u3059\u308b\u30d0\u30ea\u30a2\u9078\u629e\u7684\u30a8\u30c3\u30c1\u30f3\u30b0\u30ec\u30fc\u30c8\u3092\u78ba\u4fdd\u3057\u3066\u3044\u307e\u3059\u3002\u30d7\u30ed\u30bb\u30b9\u9762\u3067\u306f\u3001\u6a5f\u68b0\u5b66\u7fd2\u3068\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u7d42\u70b9\u691c\u51fa\u30a2\u30eb\u30b4\u30ea\u30ba\u30e0\u3092\u6d3b\u7528\u3057\u305f\u30a4\u30f3\u30b5\u30a4\u30c1\u30e5\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0\u6280\u8853\u304c\u5e73\u5766\u5316\u30d7\u30ed\u30c8\u30b3\u30eb\u306b\u9769\u547d\u3092\u3082\u305f\u3089\u3057\u3001\u30b5\u30a4\u30af\u30eb\u30bf\u30a4\u30e0\u3068\u6b20\u9665\u7387\u3092\u524a\u6e1b\u3057\u3066\u3044\u307e\u3059\u3002\u9069\u5fdc\u578b\u5727\u529b\u5909\u8abf\u6a5f\u80fd\u3092\u5099\u3048\u305f\u30b7\u30f3\u30b0\u30eb\u30a6\u30a7\u30cf\u7814\u78e8\u30b7\u30b9\u30c6\u30e0\u306e\u767b\u5834\u306f\u3001\u30d0\u30c3\u30c1\u51e6\u7406\u304b\u3089\u7cbe\u5bc6\u99c6\u52d5\u578b\u30ef\u30fc\u30af\u30d5\u30ed\u30fc\u3078\u306e\u79fb\u884c\u3092\u3055\u3089\u306b\u5f37\u8abf\u3057\u3066\u3044\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u9032\u6b69\u306f\u3001\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u3092\u52a0\u901f\u3057\u3001\u8868\u9762\u5747\u4e00\u6027\u3092\u6539\u5584\u3057\u3001\u904e\u53bb\u306b10nm\u4ee5\u4e0b\u306e\u30b9\u30b1\u30fc\u30ea\u30f3\u30b0\u3092\u5236\u7d04\u3057\u3066\u3044\u305f\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u3084\u30a8\u30ed\u30fc\u30b8\u30e7\u30f3\u73fe\u8c61\u3092\u7de9\u548c\u3059\u308b\u52b9\u679c\u3092\u3082\u305f\u3089\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n

\u6280\u8853\u7684\u30d6\u30ec\u30fc\u30af\u30b9\u30eb\u30fc\u3068\u4e26\u884c\u3057\u3066\u3001\u6301\u7d9a\u53ef\u80fd\u6027\u306e\u8981\u8acb\u304c\u30b9\u30e9\u30ea\u30fc\u914d\u5408\u3068\u5ec3\u68c4\u7269\u7ba1\u7406\u6163\u884c\u3092\u518d\u5f62\u6210\u3057\u3066\u3044\u307e\u3059\u3002\u751f\u5206\u89e3\u6027\u30ad\u30ec\u30fc\u30c8\u5264\u3084\u30ea\u30b5\u30a4\u30af\u30eb\u53ef\u80fd\u306a\u30b9\u30e9\u30ea\u30fc\u56de\u53ce\u30b7\u30b9\u30c6\u30e0\u304c\u666e\u53ca\u3057\u3064\u3064\u3042\u308a\u3001\u30d7\u30ed\u30bb\u30b9\u6027\u80fd\u3092\u72a0\u7272\u306b\u3059\u308b\u3053\u3068\u306a\u304f\u74b0\u5883\u7ba1\u7406\u3078\u306e\u5e83\u7bc4\u306a\u30b3\u30df\u30c3\u30c8\u30e1\u30f3\u30c8\u3092\u53cd\u6620\u3057\u3066\u3044\u307e\u3059\u3002\u30e1\u30fc\u30ab\u30fc\u304c\u6b69\u7559\u307e\u308a\u5411\u4e0a\u3068\u898f\u5236\u9075\u5b88\u3001\u30b3\u30b9\u30c8\u898f\u5f8b\u3092\u4e21\u7acb\u3055\u305b\u3088\u3046\u3068\u52aa\u3081\u308b\u4e2d\u3067\u3001\u3053\u308c\u3089\u306e\u5909\u9769\u7684\u306a\u5909\u5316\u306fCMP\u30b9\u30e9\u30ea\u30fc\u30a8\u30b3\u30b7\u30b9\u30c6\u30e0\u306e\u7af6\u4e89\u529b\u5b66\u3092\u518d\u5b9a\u7fa9\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n

\u5e02\u5834\u30bb\u30b0\u30e1\u30f3\u30c6\u30fc\u30b7\u30e7\u30f3\u306e\u5206\u6790\u3067\u306f\u3001\u30b9\u30e9\u30ea\u30fc\u30bf\u30a4\u30d7\u3001\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3001\u30a6\u30a7\u30cf\u30d5\u30a9\u30fc\u30de\u30c3\u30c8\u3001CMP\u30d7\u30ed\u30bb\u30b9\u69d8\u5f0f\u306b\u304a\u3051\u308b\u5fae\u5999\u306a\u9055\u3044\u304c\u3001\u5e02\u5834\u53c2\u52a0\u8005\u304c\u30bf\u30fc\u30b2\u30c3\u30c8\u3092\u7d5e\u3063\u305f\u6210\u9577\u7d4c\u8def\u3092\u8ffd\u6c42\u3059\u308b\u4e0a\u3067\u6975\u3081\u3066\u91cd\u8981\u3067\u3042\u308b\u3053\u3068\u304c\u793a\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u30b9\u30e9\u30ea\u30fc\u30bf\u30a4\u30d7\u306f\u3001\u30d0\u30ea\u30a2\uff08\u9ad8\u8a98\u96fb\u7387\/\u4f4e\u8a98\u96fb\u7387\uff09\u3001\u9285\uff08\u9178\u6027\u3001\u30a2\u30eb\u30ab\u30ea\u6027\u3001\u4e2d\u6027\uff09\u3001\u9178\u5316\u7269\uff08\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab\u3001\u30d2\u30e5\u30fc\u30e0\u30c9\u30b7\u30ea\u30ab\uff09\u306b\u5206\u985e\u3055\u308c\u307e\u3059\u3002\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306f\u3001\u30d5\u30a1\u30a6\u30f3\u30c9\u30ea\u3001\u30ed\u30b8\u30c3\u30af\u3001\u30e1\u30e2\u30ea\uff08DRAM\u3001NAND\u30d5\u30e9\u30c3\u30b7\u30e5\uff09\u306b\u7d30\u5206\u5316\u3055\u308c\u3001\u305d\u308c\u305e\u308c\u304c\u72ec\u81ea\u306e\u8981\u6c42\u3092\u6301\u3061\u307e\u3059\u3002\u30a6\u30a7\u30cf\u30b5\u30a4\u30ba\u306f200mm\u3068300mm\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\u306b\u533a\u5225\u3055\u308c\u3001\u7570\u306a\u308b\u30b9\u30e9\u30ea\u30fc\u4f9b\u7d66\u30c0\u30a4\u30ca\u30df\u30af\u30b9\u3068\u30d1\u30c3\u30c9\u8abf\u6574\u30d7\u30ed\u30c8\u30b3\u30eb\u3092\u4f34\u3044\u307e\u3059\u3002CMP\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u52b9\u7387\u3068\u30d7\u30ed\u30bb\u30b9\u5236\u5fa1\u306e\u6226\u7565\u7684\u30c8\u30ec\u30fc\u30c9\u30aa\u30d5\u306b\u5fdc\u3058\u3066\u3001\u30d0\u30c3\u30c1\u3068\u30b7\u30f3\u30b0\u30eb\u30a6\u30a7\u30cf\u306b\u5206\u3051\u3089\u308c\u307e\u3059\u3002<\/p>\n

\u5730\u57df\u5e02\u5834\u306e\u52d5\u5411\u306f\u3001\u88fd\u9020\u898f\u6a21\u3001\u30b5\u30d7\u30e9\u30a4\u30c1\u30a7\u30fc\u30f3\u306e\u6d17\u7df4\u5ea6\u3001\u898f\u5236\u74b0\u5883\u306b\u3088\u3063\u3066\u7570\u306a\u308b\u7af6\u4e89\u74b0\u5883\u3092\u6d6e\u304d\u5f6b\u308a\u306b\u3057\u3066\u3044\u307e\u3059\u3002\u7c73\u5dde\u3067\u306f\u3001\u534a\u5c0e\u4f53\u30e1\u30fc\u30ab\u30fc\u304c\u4e3b\u8981\u306a\u88c5\u7f6eOEM\u3084\u5316\u5b66\u54c1\u30e1\u30fc\u30ab\u30fc\u306b\u8fd1\u63a5\u3057\u3066\u3044\u308b\u305f\u3081\u3001\u30b9\u30e9\u30ea\u30fc\u306e\u9769\u65b0\u3068\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3092\u52a0\u901f\u3059\u308b\u7d71\u5408\u3055\u308c\u305f\u5354\u529b\u95a2\u4fc2\u304c\u80b2\u307e\u308c\u3066\u3044\u307e\u3059\u3002\u6b27\u5dde\u3001\u4e2d\u6771\u3001\u30a2\u30d5\u30ea\u30ab\uff08EMEA\uff09\u3067\u306f\u3001CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u306f\u6210\u719f\u3057\u305f\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u5206\u91ce\u3068\u65b0\u8208\u306e\u30d5\u30a1\u30a6\u30f3\u30c9\u30ea\u80fd\u529b\u304c\u6df7\u5728\u3057\u3066\u3044\u307e\u3059\u3002\u53b3\u683c\u306aEU\u5316\u5b66\u54c1\u898f\u5236\u306f\u3001\u4f4e\u6bd2\u6027\u5b89\u5b9a\u5264\u3084\u30ea\u30b5\u30a4\u30af\u30eb\u53ef\u80fd\u306a\u7814\u78e8\u5264\u30ad\u30e3\u30ea\u30a2\u306e\u958b\u767a\u3092\u4fc3\u9032\u3057\u3001EMEA\u3092\u30b5\u30b9\u30c6\u30ca\u30d6\u30eb\u306a\u30b9\u30e9\u30ea\u30fc\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\u306e\u8a66\u9a13\u5834\u3068\u3057\u3066\u4f4d\u7f6e\u3065\u3051\u3066\u3044\u307e\u3059\u3002\u30a2\u30b8\u30a2\u592a\u5e73\u6d0b\u5730\u57df\u3067\u306f\u3001\u534a\u5c0e\u4f53\u5de5\u5834\u304c\u6700\u3082\u5bc6\u96c6\u3057\u3066\u304a\u308a\u3001\u9ad8\u6027\u80fdIC CMP\u30b9\u30e9\u30ea\u30fc\u306e\u9700\u8981\u304c\u6025\u901f\u306b\u62e1\u5927\u3057\u3066\u3044\u307e\u3059\u3002\u53f0\u6e7e\u3001\u97d3\u56fd\u3001\u65e5\u672c\u306e\u5148\u9032\u30ed\u30b8\u30c3\u30af\u304a\u3088\u3073\u30e1\u30e2\u30ea\u5de5\u5834\u306f\u3001\u9ad8\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u3067\u30b5\u30d6\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u30ec\u30d9\u30eb\u306e\u5747\u4e00\u6027\u3092\u5b9f\u73fe\u3059\u308b\u6b21\u4e16\u4ee3\u7814\u78e8\u5264\u914d\u5408\u306e\u63a1\u7528\u3092\u63a8\u9032\u3057\u3066\u3044\u307e\u3059\u3002\u540c\u6642\u306b\u3001\u4e2d\u56fd\u3084\u6771\u5357\u30a2\u30b8\u30a2\u306b\u304a\u3051\u308b\u88fd\u9020\u80fd\u529b\u306e\u62e1\u5927\u306f\u3001\u8cbb\u7528\u5bfe\u52b9\u679c\u304c\u9ad8\u304f\u5805\u7262\u306a\u30b9\u30e9\u30ea\u30fc\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3078\u306e\u9700\u8981\u3092\u523a\u6fc0\u3057\u3066\u304a\u308a\u3001\u30b0\u30ed\u30fc\u30d0\u30eb\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u306f\u3001\u53b3\u3057\u3044\u7d0d\u671f\u3068\u95a2\u7a0e\u6700\u9069\u5316\u6226\u7565\u306b\u5bfe\u5fdc\u3059\u308b\u305f\u3081\u3001\u73fe\u5730\u3067\u306e\u30d6\u30ec\u30f3\u30c9\u304a\u3088\u3073\u6d41\u901a\u30bb\u30f3\u30bf\u30fc\u306e\u8a2d\u7acb\u3092\u9032\u3081\u3066\u3044\u307e\u3059\u3002<\/p>\n

### \u63a8\u9032\u8981\u56e0<\/p>\n

IC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u306e\u6210\u9577\u3092\u727d\u5f15\u3059\u308b\u4e3b\u8981\u306a\u8981\u56e0\u306f\u591a\u5c90\u306b\u308f\u305f\u308a\u307e\u3059\u3002\u7b2c\u4e00\u306b\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3051\u308b\u7d99\u7d9a\u7684\u306a\u6280\u8853\u9769\u65b0\u3001\u7279\u306b\u30ce\u30fc\u30c9\u5fae\u7d30\u5316\u306e\u9032\u5c55\u3068\u3001GAA\u3084EUV\u30d1\u30bf\u30fc\u30cb\u30f3\u30b0\u3068\u3044\u3063\u305f\u65b0\u3057\u3044\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u306e\u5c0e\u5165\u304c\u6319\u3052\u3089\u308c\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u6280\u8853\u7684\u9032\u6b69\u306f\u3001\u3088\u308a\u9ad8\u3044\u9078\u629e\u6027\u3001\u6975\u3081\u3066\u4f4e\u3044\u6b20\u9665\u7387\u3001\u305d\u3057\u3066\u7cbe\u5bc6\u306a\u7d42\u70b9\u691c\u51fa\u80fd\u529b\u3092\u6301\u3064IC CMP\u30b9\u30e9\u30ea\u30fc\u306b\u5bfe\u3059\u308b\u9700\u8981\u3092\u7d76\u3048\u305a\u9ad8\u3081\u3066\u3044\u307e\u3059\u3002<\/p>\n

\u7b2c\u4e8c\u306b\u3001\u30b9\u30e9\u30ea\u30fc\u5316\u5b66\u3068\u30d7\u30ed\u30bb\u30b9\u5236\u5fa1\u306b\u304a\u3051\u308b\u9769\u65b0\u304c\u5e02\u5834\u3092\u6d3b\u6027\u5316\u3055\u305b\u3066\u3044\u307e\u3059\u3002\u5358\u5206\u6563\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab\u3084\u30a8\u30f3\u30b8\u30cb\u30a2\u30fc\u30c9\u30d2\u30e5\u30fc\u30e0\u30c9\u30b7\u30ea\u30ab\u306e\u3088\u3046\u306a\u5148\u9032\u7684\u306a\u7814\u78e8\u7c92\u5b50\u306e\u958b\u767a\u306f\u3001\u7cbe\u5bc6\u306a\u6750\u6599\u9664\u53bb\u3092\u53ef\u80fd\u306b\u3057\u3001\u4f4e\u8a98\u96fb\u7387\u819c\u306e\u640d\u50b7\u3092\u9632\u304e\u307e\u3059\u3002\u307e\u305f\u3001\u9ad8\u8a98\u96fb\u7387\u819c\u3084\u4f4e\u8a98\u96fb\u7387\u819c\u3068\u306e\u9069\u5408\u6027\u3092\u9ad8\u3081\u308b\u305f\u3081\u306b\u518d\u8a2d\u8a08\u3055\u308c\u305f\u9285\u30d0\u30ea\u30a2\u9664\u53bb\u5316\u5b66\u54c1\u3084\u3001\u6a5f\u68b0\u5b66\u7fd2\u3068\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u7d42\u70b9\u691c\u51fa\u30a2\u30eb\u30b4\u30ea\u30ba\u30e0\u3092\u6d3b\u7528\u3057\u305f\u30a4\u30f3\u30b5\u30a4\u30c1\u30e5\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0\u6280\u8853\u306e\u5c0e\u5165\u306f\u3001\u30d7\u30ed\u30bb\u30b9\u52b9\u7387\u3068\u6b69\u7559\u307e\u308a\u3092\u5927\u5e45\u306b\u5411\u4e0a\u3055\u305b\u3066\u3044\u307e\u3059\u3002\u30b7\u30f3\u30b0\u30eb\u30a6\u30a7\u30cf\u7814\u78e8\u30b7\u30b9\u30c6\u30e0\u3078\u306e\u79fb\u884c\u3082\u3001\u7cbe\u5bc6\u306a\u5236\u5fa1\u3068\u67d4\u8edf\u6027\u3092\u63d0\u4f9b\u3057\u3001\u5e02\u5834\u306e\u6210\u9577\u3092\u5f8c\u62bc\u3057\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n

\u7b2c\u4e09\u306b\u3001\u6301\u7d9a\u53ef\u80fd\u6027\u3078\u306e\u8981\u6c42\u3068\u74b0\u5883\u898f\u5236\u306e\u5f37\u5316\u304c\u91cd\u8981\u306a\u63a8\u9032\u8981\u56e0\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002\u74b0\u5883\u3078\u306e\u914d\u616e\u304b\u3089\u3001\u751f\u5206\u89e3\u6027\u30ad\u30ec\u30fc\u30c8\u5264\u3084\u30ea\u30b5\u30a4\u30af\u30eb\u53ef\u80fd\u306a\u30b9\u30e9\u30ea\u30fc\u56de\u53ce\u30b7\u30b9\u30c6\u30e0\u3068\u3044\u3063\u305f\u30b0\u30ea\u30fc\u30f3\u306a\u4ee3\u66ff\u54c1\u306e\u958b\u767a\u3068\u63a1\u7528\u304c\u52a0\u901f\u3057\u3066\u304a\u308a\u3001\u3053\u308c\u306f\u4f01\u696d\u306e\u74b0\u5883\u30d5\u30c3\u30c8\u30d7\u30ea\u30f3\u30c8\u524a\u6e1b\u3078\u306e\u30b3\u30df\u30c3\u30c8\u30e1\u30f3\u30c8\u3092\u53cd\u6620\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n

\u7b2c\u56db\u306b\u3001\u5730\u57df\u3054\u3068\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u898f\u6a21\u3068\u9700\u8981\u306e\u62e1\u5927\u304c\u5e02\u5834\u6210\u9577\u3092\u5f37\u529b\u306b\u63a8\u9032\u3057\u3066\u3044\u307e\u3059\u3002\u7279\u306b\u30a2\u30b8\u30a2\u592a\u5e73\u6d0b\u5730\u57df\u306b\u304a\u3051\u308b\u534a\u5c0e\u4f53\u5de5\u5834\u306e\u96c6\u4e2d\u3068\u3001\u5148\u9032\u30ed\u30b8\u30c3\u30af\u304a\u3088\u3073\u30e1\u30e2\u30ea\u30c7\u30d0\u30a4\u30b9\u306e\u751f\u7523\u62e1\u5927\u306f\u3001\u9ad8\u6027\u80fdIC CMP\u30b9\u30e9\u30ea\u30fc\u306e\u9700\u8981\u3092\u62bc\u3057\u4e0a\u3052\u3066\u3044\u307e\u3059\u3002\u4e2d\u56fd\u3084\u6771\u5357\u30a2\u30b8\u30a2\u306b\u304a\u3051\u308b\u88fd\u9020\u80fd\u529b\u306e\u5897\u5f37\u3082\u3001\u8cbb\u7528\u5bfe\u52b9\u679c\u306e\u9ad8\u3044\u30b9\u30e9\u30ea\u30fc\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3078\u306e\u9700\u8981\u3092\u523a\u6fc0\u3057\u3001\u30b0\u30ed\u30fc\u30d0\u30eb\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u306b\u3088\u308b\u73fe\u5730\u5316\u6226\u7565\u3092\u4fc3\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n

\u6700\u5f8c\u306b\u3001\u7af6\u4e89\u74b0\u5883\u306b\u304a\u3051\u308b\u6226\u7565\u7684\u63d0\u643a\u3001\u6280\u8853\u7684\u5dee\u5225\u5316\u3001\u304a\u3088\u3073\u30dd\u30fc\u30c8\u30d5\u30a9\u30ea\u30aa\u306e\u591a\u69d8\u5316\u304c\u5e02\u5834\u306e\u767a\u5c55\u3092\u4fc3\u9032\u3057\u3066\u3044\u307e\u3059\u3002\u4e3b\u8981\u306a\u30b9\u30e9\u30ea\u30fc\u30e1\u30fc\u30ab\u30fc\u306f\u3001\u72ec\u81ea\u306e\u7814\u78e8\u7c92\u5b50\u5de5\u5b66\u306b\u6295\u8cc7\u3057\u3001\u5c02\u7528\u306e\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\u3092\u901a\u3058\u3066\u6b21\u4e16\u4ee3\u5316\u5b66\u54c1\u3092\u958b\u767a\u3057\u3066\u3044\u307e\u3059\u3002\u307e\u305f\u3001\u88c5\u7f6eOEM\u3068\u306e\u6226\u7565\u7684\u63d0\u643a\u3092\u901a\u3058\u3066\u3001\u30b9\u30e9\u30ea\u30fc\u6700\u9069\u5316\u30b5\u30fc\u30d3\u30b9\u3092CMP\u30b7\u30b9\u30c6\u30e0\u306b\u7d44\u307f\u8fbc\u3080\u3053\u3068\u3067\u3001\u30d7\u30ed\u30bb\u30b9\u7d71\u5408\u3068\u6b69\u7559\u307e\u308a\u6027\u80fd\u3092\u5411\u4e0a\u3055\u305b\u3066\u3044\u307e\u3059\u3002\u4e2d\u5805\u30e1\u30fc\u30ab\u30fc\u306f\u3001\u7279\u5b9a\u306e\u30cb\u30c3\u30c1\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u7279\u5316\u3059\u308b\u3053\u3068\u3067\u5e02\u5834\u30b7\u30a7\u30a2\u3092\u7372\u5f97\u3057\u3001\u5316\u5b66\u5927\u624b\u306f\u8cb7\u53ce\u3084\u6295\u8cc7\u3092\u901a\u3058\u3066\u30b9\u30e9\u30ea\u30fc\u5206\u91ce\u3078\u306e\u53c2\u5165\u3092\u5f37\u5316\u3057\u3066\u3044\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u7af6\u4e89\u529b\u5b66\u306f\u3001\u696d\u754c\u30d7\u30ec\u30fc\u30e4\u30fc\u9593\u306e\u5354\u529b\u3001\u5782\u76f4\u7d71\u5408\u3001\u304a\u3088\u3073\u7d99\u7d9a\u7684\u306a\u30a4\u30ce\u30d9\u30fc\u30b7\u30e7\u30f3\u306e\u8ecc\u8de1\u3092\u660e\u78ba\u306b\u793a\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n

### \u5c06\u6765\u5c55\u671b<\/p>\n

IC CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u306e\u5c06\u6765\u306f\u3001\u6280\u8853\u7684\u8907\u96d1\u6027\u306e\u5897\u5927\u3001\u30b5\u30d7\u30e9\u30a4\u30c1\u30a7\u30fc\u30f3\u306e\u5909\u52d5\u6027\u3001\u304a\u3088\u3073\u6301\u7d9a\u53ef\u80fd\u6027\u3078\u306e\u7d99\u7d9a\u7684\u306a\u5727\u529b\u306b\u3088\u3063\u3066\u5f62\u6210\u3055\u308c\u308b\u3068\u4e88\u6e2c\u3055\u308c\u307e\u3059\u3002\u7d99\u7d9a\u7684\u306a\u30ce\u30fc\u30c9\u5fae\u7d30\u5316\u3068GAA\u3001EUV\u306a\u3069\u306e\u65b0\u3057\u3044\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u306e\u767b\u5834\u306f\u3001IC CMP\u30b9\u30e9\u30ea\u30fc\u306b\u3055\u3089\u306a\u308b\u9ad8\u5ea6\u306a\u6027\u80fd\u3068\u7cbe\u5bc6\u306a\u5236\u5fa1\u3092\u8981\u6c42\u3057\u7d9a\u3051\u308b\u3067\u3057\u3087\u3046\u3002<\/p>\n

\u3057\u304b\u3057\u30012025\u5e74\u521d\u982d\u306b\u65bd\u884c\u3055\u308c\u305f\u7c73\u56fd\u95a2\u7a0e\u63aa\u7f6e\u306f\u3001CMP\u30b9\u30e9\u30ea\u30fc\u306e\u30b5\u30d7\u30e9\u30a4\u30c1\u30a7\u30fc\u30f3\u5168\u4f53\u306b\u6ce2\u53ca\u52b9\u679c\u3092\u3082\u305f\u3089\u3057\u3001\u5e02\u5834\u306b\u5927\u304d\u306a\u8ab2\u984c\u3092\u63d0\u8d77\u3057\u3066\u3044\u307e\u3059\u3002\u8f38\u5165\u3055\u308c\u308b\u91cd\u8981\u9271\u7269\u3084\u5316\u5b66\u8a66\u85ac\u306b\u5bfe\u3059\u308b\u95a2\u7a0e\u306e\u8ce6\u8ab2\u306f\u3001\u539f\u6750\u6599\u8cbb\u3092\u4e0a\u6607\u3055\u305b\u3001\u56fd\u5185\u88c5\u7f6e\u30e1\u30fc\u30ab\u30fc\u306b\u5e74\u959310\u5104\u30c9\u30eb\u4ee5\u4e0a\u306e\u640d\u5931\u3092\u3082\u305f\u3089\u3059\u53ef\u80fd\u6027\u304c\u6307\u6458\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u7279\u6b8a\u8a66\u85ac\u306b\u5bfe\u3059\u308b10\uff5e25%\u306e\u57fa\u672c\u95a2\u7a0e\u3068\u904b\u8cc3\u5272\u5897\u91d1\u306b\u3088\u308a\u3001\u6295\u5165\u30b3\u30b9\u30c8\u306f33\uff5e37%\u5897\u52a0\u3057\u3001\u30b9\u30e9\u30ea\u30fc\u751f\u7523\u8005\u306e\u5229\u76ca\u7387\u3092\u5727\u8feb\u3057\u3066\u3044\u307e\u3059\u3002\u307e\u305f\u3001\u534a\u5c0e\u4f53\u7279\u5b9a\u6750\u6599\u306b\u5bfe\u3059\u308b\u5831\u5fa9\u95a2\u7a0e\u306e\u53ef\u80fd\u6027\u3092\u5de1\u308b\u4e0d\u78ba\u5b9f\u6027\u306f\u3001\u9577\u671f\u7684\u306a\u4f9b\u7d66\u5951\u7d04\u306b\u5909\u52d5\u6027\u3092\u3082\u305f\u3089\u3057\u3001\u30b9\u30c6\u30fc\u30af\u30db\u30eb\u30c0\u30fc\u306f\u5728\u5eab\u30d0\u30c3\u30d5\u30a1\u306e\u898b\u76f4\u3057\u3084\u4ee3\u66ff\u8cbf\u6613\u30eb\u30fc\u30c8\u306e\u4ea4\u6e09\u3092\u4f59\u5100\u306a\u304f\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n

\u3053\u308c\u3089\u306e\u95a2\u7a0e\u4ecb\u5165\u306f\u3001\u6226\u7565\u7684\u306a\u30b5\u30d7\u30e9\u30a4\u30c1\u30a7\u30fc\u30f3\u306e\u518d\u7de8\u3092\u4fc3\u3057\u3066\u3044\u307e\u3059\u3002\u30e1\u30fc\u30ab\u30fc\u306f\u3001\u8f38\u51fa\u898f\u5236\u3092\u7de9\u548c\u3059\u308b\u305f\u3081\u306b\u8907\u6570\u306e\u5730\u57df\u306b\u308f\u305f\u3063\u3066\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u306e\u30d5\u30c3\u30c8\u30d7\u30ea\u30f3\u30c8\u3092\u591a\u69d8\u5316\u3057\u3001\u95a2\u7a0e\u306e\u4f4e\u3044\u5730\u57df\u3067\u7279\u5b9a\u306e\u30d7\u30ec\u30ab\u30fc\u30b5\u30fc\u306e\u8abf\u9054\u3092\u96c6\u4e2d\u3055\u305b\u3066\u3044\u307e\u3059\u3002\u4e00\u90e8\u306e\u5316\u5b66\u54c1\u306b\u306f\u514d\u9664\u63aa\u7f6e\u304c\u9069\u7528\u3055\u308c\u3001\u5f53\u9762\u306e\u6df7\u4e71\u306f\u7de9\u548c\u3055\u308c\u3066\u3044\u307e\u3059\u304c\u3001\u9285\u30ad\u30ec\u30fc\u30c8\u5264\u3084\u9178\u5316\u7269\u7814\u78e8\u5264\u306a\u3069\u306e\u5148\u9032\u30d7\u30ed\u30bb\u30b9\u5316\u5b66\u54c1\u306b\u5bfe\u3059\u308b\u95a2\u7a0e\u306e\u5f15\u304d\u4e0a\u3052\u306f\u3001\u30b9\u30e9\u30ea\u30fc\u54c1\u8cea\u306e\u4e00\u8cab\u6027\u3068\u4f9b\u7d66\u306e\u53ef\u7528\u6027\u306b\u5bfe\u3057\u3066\u5177\u4f53\u7684\u306a\u30ea\u30b9\u30af\u3092\u3082\u305f\u3089\u3057\u307e\u3059\u3002\u30b9\u30c6\u30fc\u30af\u30db\u30eb\u30c0\u30fc\u306f\u73fe\u5728\u3001\u9032\u5316\u3059\u308b\u8cbf\u6613\u653f\u7b56\u74b0\u5883\u306e\u4e2d\u3067\u30a6\u30a7\u30cf\u88fd\u9020\u30d1\u30a4\u30d7\u30e9\u30a4\u30f3\u306e\u5b8c\u5168\u6027\u3092\u7dad\u6301\u3059\u308b\u305f\u3081\u3001\u653f\u7b56\u7acb\u6848\u8005\u3068\u306e\u5354\u8abf\u7684\u306a\u95a2\u4e0e\u3092\u901a\u3058\u3066\u3001\u30bf\u30fc\u30b2\u30c3\u30c8\u3092\u7d5e\u3063\u305f\u95a2\u7a0e\u9664\u5916\u3084\u5408\u7406\u5316\u3055\u308c\u305f\u901a\u95a2\u624b\u7d9a\u304d\u3092\u63d0\u5531\u3059\u308b\u3053\u3068\u3092\u512a\u5148\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n

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